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Vacuum chuck of ceramics

Tasks
Precise clamping and handling of workpieces, which can not be fixtured mechanically. Fields of applications:
Measuring technology
Medicine technology
Electronic industry

Design / construction
The body of the clamping plates is made of either natural hardstone - granite or ceramic materials. Depending on it's application, the clamping plates are equipped with micro holes and/or micro-fine suction grooves. Partial faces can be switched seperately.

Technical data
Dimensions: Diameter 320 mm, height 50 mm
Flatness of the clamping surface: 0,001 mm
Parallelism clamping surface to lower contact face: 0,001

Application area
To be used for safe as well as high-precise clamping and handling of thin-walled work-pieces and transparencies, which can not be fixated mechanically. Suitable for almost every machining methods and materials.

Machining methods:
Engraving
Electrical discharge machining
Coating
Milling

Materials:
Glass
Metal
Graphite
Ceramic
Titan

Application Areas:
Metrology
Engraving technology
Electronic-, Semiconductor industry
Optics

Other dimensions, geometries, accuracies as well as application-oriented insertion of the fine clamping flutes and/or micro-drilled holes on request.

For further information, please take a look at Machining of Advanced Materials.
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